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r1 - 25 Jan 2008 - 12:11:00 -
RossRobinson
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Processing Germanium
Etch Germanium
Semiconductor Materials By Lev Isaakovich Berger (google book search),
Does not react with HCl nor dilute H2SO4. HNO3 and Agua Rega do etch GE. 3% H2O2 will dissolve Ge and precipitates
GeO2
?
BYU etch page
"1 : 25 NH3OH : H2O2 1000 angstrom/min"
So I think that I will do a rinse in HCl to get metals off, then a minute or two in NH3OH : H2O2 to get a fresh surface.
--
RossRobinson
- 25 Jan 2008
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